4520i

4520i

4520i

4520i

605-017016-100 PCB,STEPPER MOT DR,CHP

4520i, LAM, Rainbow 4420, Rainbow 4520, Rainbow 4520xl, TCP 9400se, TCP 9600se

605-017016-100 PCB,STEPPER MOT DR,CHP

645-009920-001 SWITCH OVERTEMP

4520i, 4720xl PM, 9400DFM PM, 9400DSiE PM, 9400PTX PM, 9600DFM PM, 9600PTX PM, LAM, Rainbow 4420, TCP 9400se, TCP 9600se

645-009920-001 SWITCH OVERTEMP

660-007612-001 POWER SUPPLY +24VDC @ 40 AMP

4520i, LAM, Rainbow 4420, Rainbow 4520, Rainbow 4520xl, TCP 9400se, TCP 9600se

660-007612-001 POWER SUPPLY +24VDC @ 40 AMP

660-007613-001 POWER SUPPLY TRIPLE +5 +15 +15

4520i, LAM, Rainbow 4420, Rainbow 4520, Rainbow 4520xl, TCP 9400se, TCP 9600se

660-007613-001 POWER SUPPLY TRIPLE +5 +15 +15

660-091820-001 POWER SUPPLY, 24VDC

4520i, LAM, Rainbow 4420, Rainbow 4520, Rainbow 4520xl, TCP 9400se

660-091820-001 POWER SUPPLY, 24VDC

660-091821-001 POWER SUPPLY, +5, +15, -15 VDC

4520i, LAM, Rainbow 4420, Rainbow 4520, Rainbow 4520xl, TCP 9400se

660-091821-001 POWER SUPPLY, +5, +15, -15 VDC

685-008769-001 ELEVATOR, WAFER (HINE)

4520i, LAM, Rainbow 4420, Rainbow 4520, Rainbow 4520xl, TCP 9400se, TCP 9600se

685-008769-001 ELEVATOR, WAFER (HINE)

713-011203-001 COVER 90deg ENTRANCE LOADLOCK

4520i, LAM, Rainbow 4420, Rainbow 4520, Rainbow 4520xl, TCP 9400se, TCP 9600se

713-011203-001 COVER 90deg ENTRANCE LOADLOCK

713-011205-001 COVER,180deg EXIT LOADLOCK

4520i, LAM, Rainbow 4420, Rainbow 4520, Rainbow 4520xl, TCP 9400se

713-011205-001 COVER,180deg EXIT LOADLOCK

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